Ceramic Sputtering Targets
Borides: CrB₂, HfB₂, LaB₆, TiB₂, ZrB₂. Carbides: B₄C, Cr₃C₂, HfC, SiC, TaC, TiC, WC, ZrC. Nitrides: AlN, BN, GaN, HfN, Si₃N₄, TaN, TiN, ZrN.
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